German-made OPM white light interferometer
Suitable for non-contact measurement of micro-nanostructured surfaces, especially transparent surface materials
Film thickness difference (2D/3D), X, Y, Z fine dimension measurement
Can be used as OEM components and can be used with automated measurement equipment for wafer height, roughness, and defects
High quality white light interferometer made in Germany
Features:
1. 3D surface observation of microstructures for various material products
2. Z-axis 3D PROFILE measurement of small structures
3. Non-contact roughness measurement
4. Can measure the surface structure of different reflectivity and transparent materials
5. Z-axis analysis accuracy 1nm – 0.1nm
6. It can be installed in specialized equipment institutions according to the size of the product.
3D scanning principle
white light interferenceWhite Light Interferometry:
Pass a light source of a specific wavelength through a flat or convex mirror (DI objective lens)
Two reflections through the object produce "Newton rings" (also called interference fringes).
Its Z-axis upper and lower limit range scanning definition principle
Use the generation of interference fringes as the focal length judgment value
Can be equipped with interference objectives with different magnifications
The white light interference head can be mounted on different mechanisms
Connect with the machine to perform various analyzes and measurements
Can be used with the original electric stage (optional)
Optional active anti-vibration table,Air-floating anti-vibration platform, anti-vibration damping platform
Can be integrated into various automated machines, and relevant SDKs can be opened for automation equipment integration
Export the scanned and synthesized report with one click;
3D image, 3D profile, automatic capture of the highest and lowest Z-axis surface structure heights, Sa surface roughness (or line roughness Ra)
