Industrial application
Suitable for semiconductor wafer inspection, glass panel defect inspection, probe card or IC carrier board observation
![](https://www.jys-ims.com.tw/wp-content/uploads/2021/04/gx01-300x82.png)
Observation method matching
Various observation methods can be applied to the analysis of different material structures
Dark field differential interference polarized light
![](https://www.jys-ims.com.tw/wp-content/uploads/2021/04/gx02-300x94.png)
Fluorescent IR through light/backlight
![](https://www.jys-ims.com.tw/wp-content/uploads/2021/04/gx03-300x91.png)
Expanded collocation
You can also choose to use a wafer conveyor for wafer inspection.
MARCO, BACK-SIDE, MICRO observation
Fully automatic inspection of 8/6-inch wafers, fully automatic inspection of 8/12-inch wafers
![](https://www.jys-ims.com.tw/wp-content/uploads/2021/04/gx04-300x182.png)