Large-stroke tabletop microscope, fully electric lens switching, electric aperture

Illumination observation has penetrating light and reflected light options

The industry’s only ultra-wide-angle 26.5mm field of view eyepiece

XY stage with quick movement clutch


Industrial application

 Suitable for semiconductor wafer inspection, glass panel defect inspection, probe card or IC carrier board observation

Observation method matching

 Various observation methods can be applied to the analysis of different material structures


                Dark field differential interference polarized light

                   Fluorescent IR through light/backlight

Expanded collocation

 You can also choose to use a wafer conveyor for wafer inspection.

 MARCO, BACK-SIDE, MICRO observation

 Fully automatic inspection of 8/6-inch wafers, fully automatic inspection of 8/12-inch wafers

OLYMPUS MX63 inquiry