Fully automatic wafer measurement white light interference

Fully automatic white light interferometry system

Can measure 8-inch and 12-inch wafers

LOADER can also be planned

Both FOSB and FOUP can be applied

 

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Fully automatic wafer white light interference measurement

Measurement points can be set for fully automatic measurement

Micro structure height measurement, plane measurement, roughness measurement, film thickness measurement

Export report and upload after measurement

LOADER can be planned according to the type of wafer box

Both front and back examination and microscopic examination are available

Welcome to call us for planning

 

 

Fully automatic wafer measurement white light interference inquiry